Nrog rau kev txhim kho txuas ntxiv ntawm kev sib xyaw ua ke loj, cov txheej txheem tsim cov nti tau dhau los ua ntau thiab nyuaj, thiab qhov txawv txav ntawm microstructure thiab muaj pes tsawg leeg ntawm cov khoom siv semiconductor cuam tshuam kev txhim kho ntawm cov nti tawm los, uas coj cov teeb meem loj rau kev siv cov semiconductor tshiab thiab kev koom ua ke. circuit technologies.
GRGTEST muab cov khoom siv semiconductor microstructure tsom xam thiab kev ntsuam xyuas los pab cov neeg siv khoom txhim kho semiconductor thiab cov txheej txheem sib xyaw ua ke, suav nrog kev npaj ntawm wafer qib profile thiab kev tshuaj xyuas hluav taws xob, kev tshuaj xyuas tag nrho ntawm lub cev thiab tshuaj lom neeg ntawm cov khoom siv semiconductor, kev tsim thiab kev siv cov khoom siv hluav taws xob sib kis qhov kev pab cuam.
Cov khoom siv semiconductor, cov khoom siv me me me me, cov khoom siv polymer, cov khoom siv organic / inorganic hybrid, cov khoom siv tsis yog xim hlau.
1. Chip wafer qib profile npaj thiab kev tshuaj xyuas hluav taws xob, raws li kev tsom xam ion beam technology (DB-FIB), kev txiav txim siab meej ntawm cheeb tsam ntawm cov nti, thiab cov duab hluav taws xob hauv lub sijhawm tiag tiag, tuaj yeem tau txais cov qauv chip profile, muaj pes tsawg leeg thiab lwm yam. cov ntaub ntawv tseem ceeb ntawm cov txheej txheem;
2. Kev tsom xam ntawm lub cev thiab tshuaj lom neeg ntawm cov khoom siv hluav taws xob semiconductor, suav nrog cov ntaub ntawv organic polymer, cov ntaub ntawv me me, cov khoom siv tsis zoo ntawm cov khoom tsis yog xim hlau, kev tshuaj xyuas cov qauv molecular, thiab lwm yam;
3. Kev tsim thiab kev siv cov phiaj xwm kev tshuaj ntsuam kab mob rau cov khoom siv semiconductor.Nws tuaj yeem pab cov neeg siv khoom nkag siab txog lub cev thiab tshuaj lom neeg cov yam ntxwv ntawm cov pa phem, suav nrog: tshuaj lom neeg muaj pes tsawg leeg, tshuaj xyuas cov ntsiab lus, kev tshuaj xyuas cov qauv molecular thiab lwm yam kev tshuaj xyuas lub cev thiab tshuaj lom neeg.
Kev pabcuamhom | Kev pabcuamcov khoom |
Kev txheeb xyuas cov ntsiab lus ntawm cov khoom siv semiconductor | l EDS Elemental Analysis, l X-ray photoelectron spectroscopy (XPS) elemental tsom xam |
Kev tsom xam cov qauv molecular ntawm cov khoom siv semiconductor | l FT-IR infrared spectrum tsom xam, l X-ray diffraction (XRD) spectroscopic tsom xam, l Nuclear magnetic resonance pop tsom xam (H1NMR, C13NMR) |
Microstructure tsom xam ntawm cov ntaub ntawv semiconductor | l Ob chav tsom ion beam (DBFIB) hlais tsom xam, l Field emission scanning electron microscopy (FESEM) tau siv los ntsuas thiab soj ntsuam cov microscopic morphology, l Atomic force microscopy (AFM) rau kev soj ntsuam morphology nto |