Taw qhia rau ob chav beam scanning electron microscopy (DB-FIB)

Cov cuab yeej tseem ceeb rau microanalysis cov txheej txheem suav nrog: optical microscopy (OM), ob-beam scanning electron microscopy (DB-FIB), scanning electron microscopy (SEM), thiab kis tau tus mob electron microscopy (TEM).Hnub no tsab xov xwm yuav qhia txog lub hauv paus ntsiab lus thiab daim ntawv thov ntawm DB-FIB, tsom mus rau kev pab cuam muaj peev xwm ntawm xov tooj cua thiab TV metrology DB-FIB thiab daim ntawv thov ntawm DB-FIB rau semiconductor tsom xam.

DB-FIB yog dab tsi
Dual-beam scanning electron microscope (DB-FIB) yog ib qho cuab yeej uas ua ke nrog lub teeb tsom ion beam thiab scanning electron beam ntawm ib lub tshuab tsom iav, thiab tau nruab nrog cov khoom siv xws li roj txhaj tshuaj (GIS) thiab nanomanipulator, thiaj li ua tiav ntau txoj haujlwm. xws li etching, khoom deposition, micro thiab nano ua.
Ntawm lawv, tsom ion beam (FIB) ua kom lub ion beam generated los ntawm kua gallium hlau (Ga) ion qhov chaw, ces tsom rau saum npoo ntawm cov qauv los tsim cov theem nrab electron signals, thiab yog sau los ntawm lub detector.Los yog siv cov kab hluav taws xob muaj zog tam sim no txhawm rau txhawm rau cov qauv saum npoo rau kev ua micro thiab nano;Kev sib xyaw ua ke ntawm lub cev sputtering thiab tshuaj lom neeg cov tshuaj tiv thaiv kuj tuaj yeem siv los xaiv etch lossis tso cov hlau thiab cov insulators.

Lub luag haujlwm tseem ceeb thiab kev siv ntawm DB-FIB
Lub luag haujlwm tseem ceeb: kev ua haujlwm ruaj khov ntawm ntu ntu, TEM qauv kev npaj, xaiv los yog txhim kho etching, hlau cov ntaub ntawv deposition thiab insulating txheej deposition.
Daim ntawv thov teb: DB-FIB yog siv dav hauv cov ntaub ntawv ceramic, polymers, hlau cov ntaub ntawv, biology, semiconductor, geology thiab lwm yam kev tshawb fawb thiab lwm yam khoom kuaj.Tshwj xeeb, DB-FIB qhov tshwj xeeb ruaj khov-point kis tus qauv kev npaj muaj peev xwm ua rau nws hloov tsis tau hauv cov khoom siv hluav taws xob tsis ua haujlwm.

GRGTEST DB-FIB kev pabcuam muaj peev xwm
DB-FIB tam sim no tau nruab los ntawm Shanghai IC Test thiab Analysis Laboratory yog Helios G5 series ntawm Thermo Field, uas yog qhov zoo tshaj plaws Ga-FIB series hauv khw.Cov koob tuaj yeem ua tiav kev ntsuas hluav taws xob hluav taws xob teeb pom kev daws teeb meem hauv qab 1 nm, thiab tau ua kom zoo dua ntawm ion beam kev ua tau zoo thiab automation dua li tiam dhau los ntawm ob-beam electron microscopy.DB-FIB yog nruab nrog nanomanipulators, roj txhaj tshuab (GIS) thiab lub zog spectrum EDX kom tau raws li ntau yam ntawm cov kev xav tau ntawm cov kev xav tau ntawm semiconductor ua tsis tiav.
Raws li cov cuab yeej muaj zog rau cov khoom siv hluav taws xob semiconductor lub cev tsis ua haujlwm, DB-FIB tuaj yeem ua cov ntsiab lus txuas txuas txuas txuas nrog nanometer precision.Nyob rau tib lub sij hawm ntawm FIB ua, lub scanning electron beam nrog nanometer daws teeb meem yuav siv tau los soj ntsuam lub microscopic morphology ntawm cross-section thiab soj ntsuam cov muaj pes tsawg leeg nyob rau hauv lub sij hawm.Ua kom tiav cov khoom siv hlau sib txawv (tungsten, platinum, thiab lwm yam) thiab cov khoom tsis yog xim hlau (carbon, SiO2);TEM ultra-thin slices tseem tuaj yeem npaj tau ntawm qhov chaw ruaj khov, uas tuaj yeem ua tau raws li qhov yuav tsum tau ua ntawm kev soj ntsuam ultra-siab ntawm qib atomic.
Peb yuav txuas ntxiv mus nqis peev hauv cov cuab yeej siv hluav taws xob microanalysis siab heev, txuas ntxiv txhim kho thiab nthuav dav cov khoom siv hluav taws xob tsis ua haujlwm cuam tshuam txog kev muaj peev xwm, thiab muab cov neeg siv khoom nrog cov ncauj lus kom ntxaws thiab cov kev daws teeb meem tsis ua tiav.